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README.md

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Mikromechanik

Übersichtsartikel & Infos

  • Fundamentals of MEMS = micro-electro-mechanical systems,
  • Mikromechanik, Mikrotechnik, Mikrosystemtechnik (MST), microsystems,
  • Halbleiter / Semiconductor,
  • Silicon / Silicium,
  • Quartz / Quarz,
  • piezoelectric thin-film technology (ZnO, AlN)

Further information