diff --git a/klayout/drc/rule_decks/pres.drc b/klayout/drc/rule_decks/pres.drc new file mode 100644 index 00000000..a5edfcb9 --- /dev/null +++ b/klayout/drc/rule_decks/pres.drc @@ -0,0 +1,110 @@ +# frozen_string_literal: true + +################################################################################################ +# Copyright 2022 GlobalFoundries PDK Authors +# +# Licensed under the Apache License, Version 2.0 (the "License"); +# you may not use this file except in compliance with the License. +# You may obtain a copy of the License at +# +# https://www.apache.org/licenses/LICENSE-2.0 +# +# Unless required by applicable law or agreed to in writing, software +# distributed under the License is distributed on an "AS IS" BASIS, +# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. +# See the License for the specific language governing permissions and +# limitations under the License. +################################################################################################ + +if FEOL + #================================================ + #----------------P+ POLY RESISTOR---------------- + #================================================ + + logger.info('Starting PRES derivations') + pres_poly = poly2.and(pplus).interacting(sab).interacting(res_mk).not_interacting(resistor) + + # Rule PRES.1: Minimum width of Poly2 resistor is 0.8µm. + logger.info('Executing rule PRES.1') + pres1_l1 = pres_poly.width(0.8.um, euclidian) + pres1_l1.output('PRES.1', 'PRES.1 : Minimum width of Poly2 resistor: 0.8µm') + pres1_l1.forget + + # Rule PRES.2: Minimum space between Poly2 resistors is 0.4µm. + logger.info('Executing rule PRES.2') + pres2_l1 = pres_poly.isolated(0.4.um, euclidian) + pres2_l1.output('PRES.2', 'PRES.2 : Minimum space between Poly2 resistors: 0.4µm') + pres2_l1.forget + + # Rule PRES.3: Minimum space from Poly2 resistor to COMP is 0.6.um. + logger.info('Executing rule PRES.3') + pres3_l1 = pres_poly.separation(comp, 0.6.um, euclidian).polygons(0.001.um) + pres3_l2 = comp.not_outside(pres_poly) + pres3_l = pres3_l1.or(pres3_l2) + pres3_l.output('PRES.3', 'PRES.3 : Minimum space from Poly2 resistor to COMP: 0.6.um') + pres3_l.forget + pres3_l1.forget + pres3_l2.forget + + # Rule PRES.4: Minimum space from Poly2 resistor to unrelated Poly2 is 0.6µm. + logger.info('Executing rule PRES.4') + pres4_l1 = pres_poly.separation(poly2.not_interacting(sab), 0.6.um, euclidian) + pres4_l1.output('PRES.4', 'PRES.4 : Minimum space from Poly2 resistor to unrelated Poly2: 0.6µm') + pres4_l1.forget + + # Rule PRES.5: Minimum Plus implant overlap of Poly2 resistor is 0.3µm. + logger.info('Executing rule PRES.5') + pres5_l1 = pres_poly.enclosed(pplus, 0.3.um, euclidian).polygons(0.001.um) + pres5_l2 = pres_poly.not_outside(pplus).not(pplus) + pres5_l = pres5_l1.or(pres5_l2) + pres5_l.output('PRES.5', 'PRES.5 : Minimum Plus implant overlap of Poly2 resistor: 0.3µm') + pres5_l1.forget + pres5_l2.forget + pres5_l.forget + + # Rule PRES.6: Minimum salicide block overlap of Poly2 resistor in width direction is 0.28µm. + logger.info('Executing rule PRES.6') + pres6_l1 = pres_poly.enclosed(sab, 0.28.um) + pres6_l1.output('PRES.6', 'PRES.6 : Minimum salicide block overlap of Poly2 resistor in width direction: 0.28µm') + pres6_l1.forget + + # Rule PRES.7: Minimum space from salicide block to contact on Poly2 resistor is 0.22.um. + logger.info('Executing rule PRES.7') + pres7_l1 = contact.and(pres_poly).separation(sab, 0.22.um).polygons(0.001.um) + pres7_l2 = contact.and(pres_poly).interacting(sab) + pres7_l = pres7_l1.or(pres7_l2) + pres7_l.output('PRES.7', 'PRES.7 : Minimum space from salicide block to contact on Poly2 resistor: 0.22.um') + pres7_l1.forget + pres7_l2.forget + + # Rule PRES.8 is not a DRC check + ## Please refer to https://gf180mcu-pdk.readthedocs.io/en/latest/physical_verification/design_manual/drm_10_01.html#p-poly-resistor-pres + + # Rule PRES.9a: Pplus Poly2 resistor shall be covered by RES_MK marking. + ## RES_MK length shall be coincide with resistor length (Defined by SAB length) + ## and width covering the width of Poly2. + logger.info('Executing rule PRES.9a') + mk_pres9a = res_mk.edges.not(poly2.and(pplus).and(sab).edges).inside_part(poly2) + pres9a_l1 = res_mk.interacting(pres_poly).interacting(mk_pres9a) + pres9a_l1.output('PRES.9a', + 'PRES.9a : Pplus Poly2 resistor shall be covered by RES_MK marking. + RES_MK length shall be coincide with resistor length (Defined by SAB length) + and width covering the width of Poly2.') + pres9a_l1.forget + mk_pres9a.forget + + # Rule PRES.9b: If the size of single RES_MK mark layer is greater than 15000um2 + ## and both side (X and Y) are greater than 80um. + ## then the minimum spacing to adjacent RES_MK layer is 20µm. + logger.info('Executing rule PRES.9b') + pres9b = res_mk.with_area(15_000.001.um, nil).edges.with_length(80.001.um, nil) + pres9b_l1 = pres9b.separation(res_mk.edges, 20.um) + pres9b_l1.output('PRES.9b', + 'PRES.9b : If the size of single RES_MK mark layer is greater than 15000um2 + and both side (X and Y) are greater than 80um. + then the minimum spacing to adjacent RES_MK layer: 20µm') + pres9b_l1.forget + pres9b.forget + pres_poly.forget + +end diff --git a/klayout/drc/testing/testcases/unit/pres.gds b/klayout/drc/testing/testcases/unit/pres.gds new file mode 100644 index 00000000..6a3a5289 Binary files /dev/null and b/klayout/drc/testing/testcases/unit/pres.gds differ diff --git a/klayout/drc/testing/testcases/unit/pres.svg b/klayout/drc/testing/testcases/unit/pres.svg new file mode 100644 index 00000000..703e3877 --- /dev/null +++ b/klayout/drc/testing/testcases/unit/pres.svg @@ -0,0 +1,658 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +PRES.9a +PRES.9a +PRES.9a +PRES.9a +PRES.9b +PRES.9b +PRES.9b +PRES.9b +PRES.9b +PRES.1 +PRES.1 +PRES.9a +PRES.9a +PRES.9a +PRES.9a +PRES.9a +PRES.9a +PRES.9a +PRES.1 +PRES.1 +PRES.1 +PRES.1 +PRES.1 +PRES.9a +PRES.7 +PRES.7 +PRES.1 +PRES.7 +PRES.7 +PRES.7 +PRES.7 +PRES.7 +PRES.7 +PRES.7 +PRES.1 +PRES.1 +PRES.1 +PRES.1 +PRES.1 +PRES.7 +PRES.7 +PRES.6 +PRES.6 +PRES.6 +PRES.6 +PRES.6 +PRES.6 +PRES.6 +PRES.6 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.5 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.2 +PRES.3 +PRES.3 +PRES.5 +PRES.5 +PRES.5 +PRES.4 +PRES.4 +PRES.4 +PRES.4 +PRES.4 +PRES.4 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.4 +PRES.4 +PRES.4 +PRES.4 +PRES.4 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.3 +PRES.3 + + \ No newline at end of file