adding hres drc table

klayout/drc/rule_decks/hres.drc

@@ -0,0 +1,137 @@
+################################################################################################
+# Copyright 2022 GlobalFoundries PDK Authors
+#
+# Licensed under the Apache License, Version 2.0 (the "License");
+# you may not use this file except in compliance with the License.
+# You may obtain a copy of the License at
+#
+#     https://www.apache.org/licenses/LICENSE-2.0
+#
+# Unless required by applicable law or agreed to in writing, software
+# distributed under the License is distributed on an "AS IS" BASIS,
+# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
+# See the License for the specific language governing permissions and
+# limitations under the License.
+################################################################################################
+
+
+if FEOL
+    #================================================
+    #----------------H POLY RESISTOR-----------------
+    #================================================
+
+    logger.info("Starting HRES derivations")
+    hres_poly = poly2.interacting(pplus).interacting(sab).interacting(res_mk).interacting(resistor)
+    hres1_poly = poly2.interacting(pplus).interacting(sab).interacting(res_mk)
+
+    # Rule HRES.1: Minimum space. Note : Merge if the spacing is less than 0.4 um. is 0.4µm
+    logger.info("Executing rule HRES.1")
+    hres1_l1  = resistor.interacting(hres1_poly).space(0.4.um, euclidian)
+    hres1_l1.output("HRES.1", "HRES.1 : Minimum space. Note : Merge if the spacing is less than 0.4 um. : 0.4µm")
+    hres1_l1.forget
+
+    # Rule HRES.2: Minimum width of Poly2 resistor. is 1µm
+    logger.info("Executing rule HRES.2")
+    hres2_l1  = hres_poly.width(1.um, euclidian)
+    hres2_l1.output("HRES.2", "HRES.2 : Minimum width of Poly2 resistor. : 1µm")
+    hres2_l1.forget
+
+    # Rule HRES.3: Minimum space between Poly2 resistors. is 0.4µm
+    logger.info("Executing rule HRES.3")
+    hres3_l1  = hres_poly.space(0.4.um, euclidian)
+    hres3_l1.output("HRES.3", "HRES.3 : Minimum space between Poly2 resistors. : 0.4µm")
+    hres3_l1.forget
+
+    # Rule HRES.4: Minimum RESISTOR overlap of Poly2 resistor. is 0.4µm
+    logger.info("Executing rule HRES.4")
+    hres4_l1 = hres_poly.enclosed(resistor, 0.4.um, euclidian).polygons(0.001)
+    hres4_l2 = hres_poly.not_outside(resistor).not(resistor)
+    hres4_l  = hres4_l1.or(hres4_l2)
+    hres4_l.output("HRES.4", "HRES.4 : Minimum RESISTOR overlap of Poly2 resistor. : 0.4µm")
+    hres4_l1.forget
+    hres4_l2.forget
+    hres4_l.forget
+
+    # Rule HRES.5: Minimum RESISTOR space to unrelated Poly2. is 0.3µm
+    logger.info("Executing rule HRES.5")
+    hres5_l1  = resistor.interacting(hres1_poly).separation(poly2.not_interacting(sab), 0.3.um, euclidian)
+    hres5_l1.output("HRES.5", "HRES.5 : Minimum RESISTOR space to unrelated Poly2. : 0.3µm")
+    hres5_l1.forget
+
+    # Rule HRES.6: Minimum RESISTOR space to COMP.
+    logger.info("Executing rule HRES.6")
+    hres6_l1 = resistor.interacting(hres1_poly).separation(comp, 0.3.um, euclidian).polygons(0.001)
+    hres6_l2 = comp.not_outside(resistor.interacting(hres1_poly))
+    hres6_l = hres6_l1.or(hres6_l2)
+    hres6_l.output("HRES.6", "HRES.6 : Minimum RESISTOR space to COMP.")
+    hres6_l.forget
+    hres6_l1.forget
+    hres6_l2.forget
+    hres1_poly.forget
+
+    # Rule HRES.7: Minimum Pplus overlap of contact on Poly2 resistor. is 0.2µm
+    logger.info("Executing rule HRES.7")
+    hres7_l1 = contact.and(hres_poly).enclosed(pplus, 0.2.um, euclidian).polygons(0.001)
+    hres7_l2 = contact.and(hres_poly).not_outside(pplus).not(pplus)
+    hres7_l  = hres7_l1.or(hres7_l2)
+    hres7_l.output("HRES.7", "HRES.7 : Minimum Pplus overlap of contact on Poly2 resistor. : 0.2µm")
+    hres7_l1.forget
+    hres7_l2.forget
+    hres7_l.forget
+
+    # Rule HRES.8: Space from salicide block to contact on Poly2 resistor.
+    logger.info("Executing rule HRES.8")
+    hres8_l1 = contact.and(hres_poly).separation(sab,0.22.um).polygons(0.001).or(contact.and(hres_poly).interacting(sab))
+    hres8_l1.output("HRES.8", "HRES.8 : Space from salicide block to contact on Poly2 resistor.")
+    hres8_l1.forget
+
+    # Rule HRES.9: Minimum salicide block overlap of Poly2 resistor in width direction.
+    logger.info("Executing rule HRES.9")
+    hres9_sab             = sab.interacting(pplus).interacting(res_mk).interacting(resistor)
+    hres9_clear_sab       = hres9_sab.not(hres_poly)
+    hres9_bad_inside_edge = hres9_sab.edges.inside_part(hres_poly).extended(0,0,0.001,0.001).interacting(hres9_clear_sab, 1, 1)
+    hres9_sab_hole        = hres9_sab.holes.and(hres_poly)    
+    hres9_l1 = hres_poly.enclosed(hres9_sab, 0.28.um, euclidian).polygons(0.001)
+    hres9_l2 = hres9_bad_inside_edge.or(hres9_sab_hole)
+    hres9_l = hres9_l1.or(hres9_l2)
+    hres9_l.output("HRES.9", "HRES.9 : Minimum salicide block overlap of Poly2 resistor in width direction.")
+    hres9_l.forget
+    hres9_l1.forget
+    hres9_l2.forget
+    hres9_sab.forget
+    hres9_clear_sab.forget
+    hres9_bad_inside_edge.forget
+    hres9_sab_hole.forget
+
+    # Rule HRES.10: Minimum & maximum Pplus overlap of SAB.
+    logger.info("Executing rule HRES.10")
+    pplus1_hres10 = pplus.and(sab).drc(width != 0.1.um)
+    pplus2_hres10 = pplus.not_overlapping(sab).edges    
+    hres10_l1 = pplus1_hres10.or(pplus2_hres10).extended(0, 0, 0.001, 0.001).interacting(hres_poly)
+    hres10_l1.output("HRES.10", "HRES.10 : Minimum & maximum Pplus overlap of SAB.")
+    hres10_l1.forget
+    pplus1_hres10.forget
+    pplus2_hres10.forget
+
+    # Rule HRES.11 is not a DRC check
+    ## Please refer to https://gf180mcu-pdk.readthedocs.io/en/latest/physical_verification/design_manual/drm_10_03.html#hres-poly-resistor-phres-optional-with-one-additional-mask
+
+    # Rule HRES.12a: P type Poly2 resistor (high sheet rho) shall be covered by RES_MK marking. RES_MK length shall be coincide with resistor length (Defined by Pplus space) and width covering the width of Poly2.
+    logger.info("Executing rule HRES.12a")
+    mk_hres12a = res_mk.edges.not(poly2.not(pplus).and(sab).edges).inside_part(poly2)
+    hres12a_l1 = res_mk.interacting(resistor).interacting(mk_hres12a)
+    hres12a_l1.output("HRES.12a", "HRES.12a : P type Poly2 resistor (high sheet rho) shall be covered by RES_MK marking. RES_MK length shall be coincide with resistor length (Defined by Pplus space) and width covering the width of Poly2. ")
+    hres12a_l1.forget
+    mk_hres12a.forget
+
+    # Rule HRES.12b: If the size of single RES_MK mark layer is greater than 15000 um2 and both side (X and Y) are greater than 80 um. Then the minimum spacing to adjacent RES_MK layer. is 20µm
+    logger.info("Executing rule HRES.12b")
+    hres12b = res_mk.with_area(15000.001.um,nil).edges.with_length(80.001.um,nil)
+    hres12b_l1 = hres12b.separation(res_mk.edges, 20.um)
+    hres12b_l1.output("HRES.12b", "HRES.12b : If the size of single RES_MK mark layer is greater than 15000 um2 and both side (X and Y) are greater than 80 um. Then the minimum spacing to adjacent RES_MK layer. : 20µm")
+    hres12b_l1.forget
+    hres12b.forget
+    hres_poly.forget
+
+end #FEOL
+