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Update wafer-fabrication.md
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aiwang24 authored May 13, 2024
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Expand Up @@ -22,7 +22,7 @@ The very first test wafer was fabricated in 2018 by Dennis Ward and Kris Payer i

(photo of people in cleanroom bunny suits)

Despite the complexity of computationally generating the image and layout files, patterning the tiny text on a silicon wafer is easy - for someone familiar with the fabrication processes used every day for micro- and nano- technology. First, the specially cleaned wafer is loaded into deposition chambers to grow a thin silicon nitride layer followed by an aluminum layer. The two layers combined are approximately 100nm thick, or 500-1000 times thinner than a single human hair. The wafer is then coated with photoresist and exposed in a direct-write photolithography tool to make an etch mask. Finally, the aluminum is selectively etched and the photoresist removed to create the image on the wafer.
Despite the complexity of computationally generating the image and layout files, patterning the tiny text on a silicon wafer is easy - for someone familiar with the fabrication processes used every day for micro- and nano- technology. First, the specially cleaned wafer is loaded into deposition chambers to grow a thin silicon nitride layer followed by an aluminum layer. The two layers combined measure approximately 100nm in thickness, or 500-1000 times thinner than a single human hair. The wafer is then coated with photoresist and exposed in a direct-write photolithography tool to make an etch mask. Finally, the aluminum is selectively etched and the photoresist removed to create the image on the wafer.

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