diff --git a/CMakeLists.txt b/CMakeLists.txt
index 9570c449..e47b4121 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -38,14 +38,22 @@ if(CMAKE_SYSTEM_NAME STREQUAL "Windows")
     set(SLANG_RHI_HAS_VULKAN ON)
     set(SLANG_RHI_HAS_METAL OFF)
     set(SLANG_RHI_HAS_CUDA ON)
-    set(SLANG_RHI_HAS_WGPU ON)
+    if(${CMAKE_SYSTEM_PROCESSOR} MATCHES "x86_64|AMD64")
+        set(SLANG_RHI_HAS_WGPU ON)
+    else()
+        set(SLANG_RHI_HAS_WGPU OFF)
+    endif()
 elseif(CMAKE_SYSTEM_NAME STREQUAL "Linux")
     set(SLANG_RHI_HAS_D3D11 OFF)
     set(SLANG_RHI_HAS_D3D12 OFF)
     set(SLANG_RHI_HAS_VULKAN ON)
     set(SLANG_RHI_HAS_METAL OFF)
     set(SLANG_RHI_HAS_CUDA ON)
-    set(SLANG_RHI_HAS_WGPU ON)
+    if(${CMAKE_SYSTEM_PROCESSOR} MATCHES "x86_64|AMD64")
+        set(SLANG_RHI_HAS_WGPU ON)
+    else()
+        set(SLANG_RHI_HAS_WGPU OFF)
+    endif()
 elseif(CMAKE_SYSTEM_NAME STREQUAL "Darwin")
     set(SLANG_RHI_HAS_D3D11 OFF)
     set(SLANG_RHI_HAS_D3D12 OFF)