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pyPEC ======== Author: Fabian Beutel ([email protected]) pyPEC is a small package to perform Monte Carlo simulations to be used for proximity corrections for E-Beam lithography. The software uses PENELOPE (https://www.oecd-nea.org/tools/abstract/detail/nea-1525) to perform the simulations. It is based on scripts written originally by Silvia Diewald ([email protected]). Installation -------------- The software can be installed like any other python package. For example, to directly install it from the repository: pip install git+https://github.com/fbeutel/pypec.git Configuration -------------- pyPEC needs to be able to find the *pencyl* executable and the material (.mat) files. By default, the paths are: - pencyl_path: ~/.local/share/pyPEC/pencyl - database directory: ~./local/share/pyPEC/database These paths can be changed in a config file (located usually in ~/.config/pyPEC/config.ini) or by passing the corresponding command line arguments. Run -------------- Run the program by calling pypec stack.yml where stack.yml is a YAML formatted file as follows: stack: - PMMA: 200nm - Si3N4: 350nm - SiO2: 200nm - Si: 800nm voltage: 100kV relative_z: 0.5 The last two lines are optional.
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pyPEC is a small package to perform Monte Carlo simulations to be used for proximity corrections for E-Beam lithography.
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