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Adding PRES table for GF180MCU DRC #64

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Apr 6, 2023
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110 changes: 110 additions & 0 deletions klayout/drc/rule_decks/pres.drc
Original file line number Diff line number Diff line change
@@ -0,0 +1,110 @@
# frozen_string_literal: true

################################################################################################
# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
# https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.
################################################################################################

if FEOL
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#58 but not blocking

#================================================
#----------------P+ POLY RESISTOR----------------
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#57 but not blocking

#================================================

logger.info('Starting PRES derivations')
pres_poly = poly2.and(pplus).interacting(sab).interacting(res_mk).not_interacting(resistor)

# Rule PRES.1: Minimum width of Poly2 resistor is 0.8µm.
logger.info('Executing rule PRES.1')
pres1_l1 = pres_poly.width(0.8.um, euclidian)
pres1_l1.output('PRES.1', 'PRES.1 : Minimum width of Poly2 resistor: 0.8µm')
pres1_l1.forget
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#53 but not blocking


# Rule PRES.2: Minimum space between Poly2 resistors is 0.4µm.
logger.info('Executing rule PRES.2')
pres2_l1 = pres_poly.isolated(0.4.um, euclidian)
pres2_l1.output('PRES.2', 'PRES.2 : Minimum space between Poly2 resistors: 0.4µm')
pres2_l1.forget

# Rule PRES.3: Minimum space from Poly2 resistor to COMP is 0.6.um.
logger.info('Executing rule PRES.3')
pres3_l1 = pres_poly.separation(comp, 0.6.um, euclidian).polygons(0.001.um)
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why do we have .001 here?

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can we use 1.dbu instead?

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filed #66 to discuss this further

pres3_l2 = comp.not_outside(pres_poly)
pres3_l = pres3_l1.or(pres3_l2)
pres3_l.output('PRES.3', 'PRES.3 : Minimum space from Poly2 resistor to COMP: 0.6.um')
pres3_l.forget
pres3_l1.forget
pres3_l2.forget

# Rule PRES.4: Minimum space from Poly2 resistor to unrelated Poly2 is 0.6µm.
logger.info('Executing rule PRES.4')
pres4_l1 = pres_poly.separation(poly2.not_interacting(sab), 0.6.um, euclidian)
pres4_l1.output('PRES.4', 'PRES.4 : Minimum space from Poly2 resistor to unrelated Poly2: 0.6µm')
pres4_l1.forget

# Rule PRES.5: Minimum Plus implant overlap of Poly2 resistor is 0.3µm.
logger.info('Executing rule PRES.5')
pres5_l1 = pres_poly.enclosed(pplus, 0.3.um, euclidian).polygons(0.001.um)
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why do we have .001 here?

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can we use 1.dbu instead?

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filed #66 to discuss this further

pres5_l2 = pres_poly.not_outside(pplus).not(pplus)
pres5_l = pres5_l1.or(pres5_l2)
pres5_l.output('PRES.5', 'PRES.5 : Minimum Plus implant overlap of Poly2 resistor: 0.3µm')
pres5_l1.forget
pres5_l2.forget
pres5_l.forget

# Rule PRES.6: Minimum salicide block overlap of Poly2 resistor in width direction is 0.28µm.
logger.info('Executing rule PRES.6')
pres6_l1 = pres_poly.enclosed(sab, 0.28.um)
pres6_l1.output('PRES.6', 'PRES.6 : Minimum salicide block overlap of Poly2 resistor in width direction: 0.28µm')
pres6_l1.forget

# Rule PRES.7: Minimum space from salicide block to contact on Poly2 resistor is 0.22.um.
logger.info('Executing rule PRES.7')
pres7_l1 = contact.and(pres_poly).separation(sab, 0.22.um).polygons(0.001.um)
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why do we have .001 here?

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can we use 1.dbu instead?

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filed #66 to discuss this further

pres7_l2 = contact.and(pres_poly).interacting(sab)
pres7_l = pres7_l1.or(pres7_l2)
pres7_l.output('PRES.7', 'PRES.7 : Minimum space from salicide block to contact on Poly2 resistor: 0.22.um')
pres7_l1.forget
pres7_l2.forget

# Rule PRES.8 is not a DRC check
## Please refer to https://gf180mcu-pdk.readthedocs.io/en/latest/physical_verification/design_manual/drm_10_01.html#p-poly-resistor-pres
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#55 but not blocking


# Rule PRES.9a: Pplus Poly2 resistor shall be covered by RES_MK marking.
## RES_MK length shall be coincide with resistor length (Defined by SAB length)
## and width covering the width of Poly2.
logger.info('Executing rule PRES.9a')
mk_pres9a = res_mk.edges.not(poly2.and(pplus).and(sab).edges).inside_part(poly2)
pres9a_l1 = res_mk.interacting(pres_poly).interacting(mk_pres9a)
pres9a_l1.output('PRES.9a',
'PRES.9a : Pplus Poly2 resistor shall be covered by RES_MK marking.
RES_MK length shall be coincide with resistor length (Defined by SAB length)
and width covering the width of Poly2.')
pres9a_l1.forget
mk_pres9a.forget

# Rule PRES.9b: If the size of single RES_MK mark layer is greater than 15000um2
## and both side (X and Y) are greater than 80um.
## then the minimum spacing to adjacent RES_MK layer is 20µm.
logger.info('Executing rule PRES.9b')
pres9b = res_mk.with_area(15_000.001.um, nil).edges.with_length(80.001.um, nil)
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why do we have .001 here?

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Answered that before.

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can we use 1.dbu instead?

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filed #66 to discuss this further

pres9b_l1 = pres9b.separation(res_mk.edges, 20.um)
pres9b_l1.output('PRES.9b',
'PRES.9b : If the size of single RES_MK mark layer is greater than 15000um2
and both side (X and Y) are greater than 80um.
then the minimum spacing to adjacent RES_MK layer: 20µm')
pres9b_l1.forget
pres9b.forget
pres_poly.forget

end
Binary file added klayout/drc/testing/testcases/unit/pres.gds
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