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Adding LRES table for GF180MCU DRC #65

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109 changes: 109 additions & 0 deletions klayout/drc/rule_decks/lres.drc
Original file line number Diff line number Diff line change
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# frozen_string_literal: true

################################################################################################
# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
# https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.
################################################################################################

if FEOL
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#58 but not blocking

#================================================
#----------------N+ POLY RESISTOR----------------
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#57 but not blocking

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#57 but not blocking

#================================================

logger.info('Starting LRES derivations')
lres_poly = poly2.and(nplus).interacting(sab).interacting(res_mk)
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# Rule LRES.1: Minimum width of Poly2 resistor is 0.8µm.
logger.info('Executing rule LRES.1')
lres1_l1 = lres_poly.width(0.8.um, euclidian)
lres1_l1.output('LRES.1', 'LRES.1 : Minimum width of Poly2 resistor: 0.8µm')
lres1_l1.forget
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#53 but not blocking

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#53 but not blocking

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#53 but not blocking


# Rule LRES.2: Minimum space between Poly2 resistors is 0.4µm.
logger.info('Executing rule LRES.2')
lres2_l1 = lres_poly.isolated(0.4.um, euclidian)
lres2_l1.output('LRES.2', 'LRES.2 : Minimum space between Poly2 resistors: 0.4µm')
lres2_l1.forget

# Rule LRES.3: Minimum space from Poly2 resistor to COMP is 0.6um.
logger.info('Executing rule LRES.3')
lres3_l1 = lres_poly.separation(comp, 0.6.um, euclidian).polygons(0.001.um).or(comp.not_outside(lres_poly))
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why do we have .001 here?

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All polygons(0.001.um) are for visibility and being able to join the results. But we can't remove that as we combine the layers down the line as well.

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can you clarify what "All polygons(0.001.um) are for visibility" means? (or even better add a comment in the rule that explain that)

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When run any kind of spacing check, it generates edges rather than polygons. We convert them to polygons with with 0.001.um. This is what this does.

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and what is the reason we don't keep them as edges? is to be able to do or() on them or to be able to call output()?

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@proppy exactly.

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would https://www.klayout.de/doc/code/class_EdgeProcessor.html#method43 also work here? what would be the trade off of using one versus the other?

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We haven't used that method. Also, we don't know if it's exposed for usage in DRC or not. Keep in mind that some of those might not be exposed to be used in DRC. polygons has been tested significantly. It's fast and tested.

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@proppy I don't mind that you could test out the function that you have highlighted above. If it's faster or better, happy to change. But if there is no impact, I recommend leaving polygons as is.

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filed #67 to discuss this further

lres3_l1.output('LRES.3', 'LRES.3 : Minimum space from Poly2 resistor to COMP: 0.6.um')
lres3_l1.forget

# Rule LRES.4: Minimum space from Poly2 resistor to unrelated Poly2 is 0.6µm.
logger.info('Executing rule LRES.4')
lres4_l1 = lres_poly.separation(poly2.not_interacting(sab), 0.6.um, euclidian)
lres4_l1.output('LRES.4', 'LRES.4 : Minimum space from Poly2 resistor to unrelated Poly2: 0.6µm')
lres4_l1.forget

# Rule LRES.5: Minimum Nplus implant overlap of Poly2 resistor is 0.3µm.
logger.info('Executing rule LRES.5')
lres5_l1 = lres_poly.enclosed(nplus, 0.3.um, euclidian).polygons(0.001.um)
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@proppy proppy Apr 5, 2023

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why do we have .001 here?

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Same

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filed #66 to discuss this further

lres5_l2 = lres_poly.not_outside(nplus).not(nplus)
lres5_l = lres5_l1.or(lres5_l2)
lres5_l.output('LRES.5', 'LRES.5 : Minimum Nplus implant overlap of Poly2 resistor: 0.3µm')
lres5_l1.forget
lres5_l2.forget
lres5_l.forget

# Rule LRES.6: Minimum salicide block overlap of Poly2 resistor in width direction is 0.28µm.
logger.info('Executing rule LRES.6')
lres6_l1 = lres_poly.enclosed(sab, 0.28.um)
lres6_l1.output('LRES.6', 'LRES.6 : Minimum salicide block overlap of Poly2 resistor in width direction: 0.28µm')
lres6_l1.forget

# Rule LRES.7: Minimum space from salicide block to contact on Poly2 resistor is 0.22.um.
logger.info('Executing rule LRES.7')
cont_lres7 = contact.and(lres_poly)
lres7_l1 = cont_lres7.separation(sab, 0.22.um).polygons(0.001.um)
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why do we have .001 here?

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filed #66 to discuss this further

lres7_l2 = cont_lres7.interacting(sab)
lres7_l = lres7_l1.or(lres7_l2)
lres7_l.output('LRES.7', 'LRES.7 : Minimum space from salicide block to contact on Poly2 resistor: 0.22.um')
lres7_l.forget
lres7_l1.forget
lres7_l2.forget
cont_lres7.forget

# Rule LRES.8 is not a DRC check
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#55 but not blocking

## Please refer to https://gf180mcu-pdk.readthedocs.io/en/latest/physical_verification/design_manual/drm_10_02.html#n-poly-resistor-low-sheet-rho

# Rule LRES.9a: Nplus Poly2 resistor shall be covered by RES_MK marking.
## RES_MK length shall be coincide with resistor length (Defined by SAB length)
## and width covering the width of Poly2.
logger.info('Executing rule LRES.9a')
mk_lres9 = res_mk.edges.not(poly2.and(nplus).and(sab).edges).inside_part(poly2)
lres9a_l1 = res_mk.interacting(lres_poly).interacting(mk_lres9)
lres9a_l1.output('LRES.9a',
'LRES.9a : Nplus Poly2 resistor shall be covered by RES_MK marking.
RES_MK length shall be coincide with resistor length (Defined by SAB length)
and width covering the width of Poly2. ')
lres9a_l1.forget
mk_lres9.forget

# Rule LRES.9b: If the size of single RES_MK mark layer is greater than 15000um2
## and both side (X and Y) are greater than 80um.
## then the minimum spacing to adjacent RES_MK layer is 20µm.
logger.info('Executing rule LRES.9b')
lres9b = res_mk.with_area(15_000.001.um, nil).edges.with_length(80.001.um, nil)
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why do we have .001 here?

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As the rule wording explains, greater than 15000 not greater than or equal.

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what about using 15_000.um + 1.dbu instead? that seems less arbitrary than .001?

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filed #67 to discuss this further

lres9b_l1 = lres9b.separation(res_mk.edges, 20.um)
lres9b_l1.output('LRES.9b',
'LRES.9b : If the size of single RES_MK mark layer is greater than 15000um2
and both side (X and Y) are greater than 80um.
then the minimum spacing to adjacent RES_MK layer: 20µm')
lres9b_l1.forget
lres9b.forget
lres_poly.forget

end
Binary file added klayout/drc/testing/testcases/unit/lres.gds
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