Fixed #define PWM_SCALE typos in various IC HWAbstraction files

[raffitaff]

Noticed that the #define TMC****_PWM_SCALE implementation was wrong in a few IC's due to a typo while also having inconsistent naming across the ICs.

For instance, some defined the register as PWMSCALE AND THEN USED PWM_SCALE in the definition of the register field macro. This would cause warnings and errors if attempting to used the field macro for this register.

Some ICs like TMC2240 had consistent naming of PWMSCALE between the register define and field define. But I updated to 'PWM_SCALE' in these cases to be consistent with other ICs and the IC documentation naming convention.

Note: TMC5130 also incorrectly defined PWM_SCALE as PWM_STATUS at register 0x71. This was fixed.

This is a PR for Issue #65 .