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Adding HRES table for GF180MCU DRC #63

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Apr 6, 2023
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Adding HRES table for GF180MCU DRC #63

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73e7029
Adding HRES table for GF180MCU DRC
FaragElsayed2 Apr 3, 2023
4158bc1
Updating comments for DRC rules
FaragElsayed2 Apr 5, 2023
f540526
Optimizing some derivations for HRES
FaragElsayed2 Apr 5, 2023
1e89183
Adding intermediate var for HRES table
FaragElsayed2 Apr 5, 2023
cf9bc6a
Adding intermediate var for HRES table
FaragElsayed2 Apr 5, 2023
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150 changes: 150 additions & 0 deletions klayout/drc/rule_decks/hres.drc
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# frozen_string_literal: true

################################################################################################
# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
# https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.
################################################################################################

if FEOL
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#58 but not blocking

#================================================
#----------------H POLY RESISTOR-----------------
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#57 but not blocking

#================================================

logger.info('Starting HRES derivations')
hres_poly = poly2.interacting(pplus).interacting(sab).interacting(res_mk).interacting(resistor)
hres1_poly = poly2.interacting(pplus).interacting(sab).interacting(res_mk)

# Rule HRES.1: Minimum space. Note : Merge if the spacing is less than 0.4 um. is 0.4µm
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not sure why need to repeat the constraint twice?

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Same as above

logger.info('Executing rule HRES.1')
hres1_l1 = resistor.interacting(hres1_poly).space(0.4.um, euclidian)
hres1_l1.output('HRES.1', 'HRES.1 : Minimum space. Note : Merge if the spacing is less than 0.4 um. : 0.4µm')
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hres1_l1.forget
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#53 but not blocking


# Rule HRES.2: Minimum width of Poly2 resistor. is 1µm
logger.info('Executing rule HRES.2')
hres2_l1 = hres_poly.width(1.um, euclidian)
hres2_l1.output('HRES.2', 'HRES.2 : Minimum width of Poly2 resistor. : 1µm')
hres2_l1.forget

# Rule HRES.3: Minimum space between Poly2 resistors. is 0.4µm
logger.info('Executing rule HRES.3')
hres3_l1 = hres_poly.space(0.4.um, euclidian)
hres3_l1.output('HRES.3', 'HRES.3 : Minimum space between Poly2 resistors. : 0.4µm')
hres3_l1.forget

# Rule HRES.4: Minimum RESISTOR overlap of Poly2 resistor. is 0.4µm
logger.info('Executing rule HRES.4')
hres4_l1 = hres_poly.enclosed(resistor, 0.4.um, euclidian).polygons(0.001.um)
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hres4_l2 = hres_poly.not_outside(resistor).not(resistor)
hres4_l = hres4_l1.or(hres4_l2)
hres4_l.output('HRES.4', 'HRES.4 : Minimum RESISTOR overlap of Poly2 resistor. : 0.4µm')
hres4_l1.forget
hres4_l2.forget
hres4_l.forget

# Rule HRES.5: Minimum RESISTOR space to unrelated Poly2. is 0.3µm
logger.info('Executing rule HRES.5')
hres5_l1 = resistor.interacting(hres1_poly).separation(poly2.not_interacting(sab), 0.3.um, euclidian)
hres5_l1.output('HRES.5', 'HRES.5 : Minimum RESISTOR space to unrelated Poly2. : 0.3µm')
hres5_l1.forget

# Rule HRES.6: Minimum RESISTOR space to COMP.
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logger.info('Executing rule HRES.6')
hres6_l1 = resistor.interacting(hres1_poly).separation(comp, 0.3.um, euclidian).polygons(0.001.um)
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hres6_l2 = comp.not_outside(resistor.interacting(hres1_poly))
hres6_l = hres6_l1.or(hres6_l2)
hres6_l.output('HRES.6', 'HRES.6 : Minimum RESISTOR space to COMP.')
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hres6_l.forget
hres6_l1.forget
hres6_l2.forget
hres1_poly.forget

# Rule HRES.7: Minimum Pplus overlap of contact on Poly2 resistor. is 0.2µm
logger.info('Executing rule HRES.7')
hres7_l1 = contact.and(hres_poly).enclosed(pplus, 0.2.um, euclidian).polygons(0.001.um)
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why do we have .001 here?

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can we use 1.dbu instead?

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@proppy DBU is sensitive to GDS scaling. I prefer real measurement value.

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@proppy proppy Apr 5, 2023 •
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but don't we want to smaller possible unit there?

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Yes, but In some cases were we are measuring corner to corner for example, we have seen that klayout has numerical errors. And it's better to have a slightly larger tolerance.

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then maybe it's best to define a top level ε variable for this delta so that arithmetic can be done on it (when you need to add or subtract it) and be easier to update if the "numerical errors" conditions happen to change.

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@proppy Each rule might have a different delta. It's not the same for all rules. I thought like you mentioned above, but while running through klayout and testing. We have seen that every type of rule might have a different delta.

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My comment to this: measurements usually are taken in terms of database units (usually nm). Rounding happens to the closer value and is not exactly specified when in between. So if you measure across a diagonal, you may have an exact value like 0.9995 and it will come out as 1000 DBU (assuming a DBU of 1 nm) or 999 DBU which will either give you an error or not.
It is pretty common in any-angle situations that you have to work with some delta. Technically you could implement the check with projection metrics exactly and with a slightly smaller value in Euclidian metrics.

But honestly I think this is nitpicking. Physics is usually in a way that corner-to-corner situations are much different from edge-to-edge ones due to resist or lithography effects and long lines usually behave differently than short edge-to-edge interaction cases. There is no simple mathematical model that describes these cases properly. Every rule you are using is an approximation and so are the check implementations. In practice, DRC checks are made to remind you to take care of potentially critical situations. It's not a good idea to exploit the layout space down to the very limits allowed by DRC (and good layout engineers know that), so whether the check is precise to nanometers or not does not make a difference between a functional and a non-functional chip.

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@proppy proppy Apr 6, 2023 •
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Each rule might have a different delta

Is that currently the case (I couldn't only find 0.001um delta in the current set of rules) or something that you're predicting?

But honestly I think this is nitpicking

How would you recommend that we maintain those delta?

  • encode them directly it in the rule parameter: with_length(80.00X.um, nil)
  • express them with discrete offset value: with_length(80.001.um + X.dbu, nil)

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filed #67 to discuss this further

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should we save contact.and(hres_poly) in an intermediate variable? it seems that it is duplicated below.

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Done

hres7_l2 = contact.and(hres_poly).not_outside(pplus).not(pplus)
hres7_l = hres7_l1.or(hres7_l2)
hres7_l.output('HRES.7', 'HRES.7 : Minimum Pplus overlap of contact on Poly2 resistor. : 0.2µm')
hres7_l1.forget
hres7_l2.forget
hres7_l.forget

# Rule HRES.8: Space from salicide block to contact on Poly2 resistor.
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logger.info('Executing rule HRES.8')
hres8_l1 = contact.and(hres_poly).separation(sab,
0.22.um).polygons(0.001.um).or(contact.and(hres_poly).interacting(sab))
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why do we have .001 here?

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can we use 1.dbu instead?

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@proppy Same comment.

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Is that a workaround for a KLayout bug?

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according to #65 (comment) this is to convert edges to polygons, I suggested using simple_merge_e2p instead but @atorkmabrains is not sure if this is available in the DRC context.

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filed #66 to investigate this further

hres8_l1.output('HRES.8', 'HRES.8 : Space from salicide block to contact on Poly2 resistor.')
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hres8_l1.forget

# Rule HRES.9: Minimum salicide block overlap of Poly2 resistor in width direction.
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logger.info('Executing rule HRES.9')
hres9_sab = sab.interacting(pplus).interacting(res_mk).interacting(resistor)
hres9_clear_sab = hres9_sab.not(hres_poly)
hres9_bad_inside_edge = hres9_sab.edges.inside_part(hres_poly).extended(0, 0, 0.001.um, 0.001.um).interacting(
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why do we have .001 here?

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can we use 1.dbu instead?

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added #66

hres9_clear_sab, 1, 1
)
hres9_sab_hole = hres9_sab.holes.and(hres_poly)
hres9_l1 = hres_poly.enclosed(hres9_sab, 0.28.um, euclidian).polygons(0.001.um)
hres9_l2 = hres9_bad_inside_edge.or(hres9_sab_hole)
hres9_l = hres9_l1.or(hres9_l2)
hres9_l.output('HRES.9', 'HRES.9 : Minimum salicide block overlap of Poly2 resistor in width direction.')
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hres9_l.forget
hres9_l1.forget
hres9_l2.forget
hres9_sab.forget
hres9_clear_sab.forget
hres9_bad_inside_edge.forget
hres9_sab_hole.forget

# Rule HRES.10: Minimum & maximum Pplus overlap of SAB.
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logger.info('Executing rule HRES.10')
pplus1_hres10 = pplus.and(sab).drc(width != 0.1.um)
pplus2_hres10 = pplus.not_overlapping(sab).edges
hres10_l1 = pplus1_hres10.or(pplus2_hres10).extended(0, 0, 0.001.um, 0.001.um).interacting(hres_poly)
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why do we have .001 here?

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can we use 1.dbu instead?

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added #66

hres10_l1.output('HRES.10', 'HRES.10 : Minimum & maximum Pplus overlap of SAB.')
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hres10_l1.forget
pplus1_hres10.forget
pplus2_hres10.forget

# Rule HRES.11 is not a DRC check
## Please refer to https://gf180mcu-pdk.readthedocs.io/en/latest/physical_verification/design_manual/drm_10_03.html#hres-poly-resistor-phres-optional-with-one-additional-mask
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#55 but not blocking


# Rule HRES.12a: P type Poly2 resistor (high sheet rho) shall be covered by RES_MK marking.
## RES_MK length shall be coincide with resistor length (Defined by Pplus space)
## and width covering the width of Poly2.
logger.info('Executing rule HRES.12a')
mk_hres12a = res_mk.edges.not(poly2.not(pplus).and(sab).edges).inside_part(poly2)
hres12a_l1 = res_mk.interacting(resistor).interacting(mk_hres12a)
hres12a_l1.output('HRES.12a',
'HRES.12a : P type Poly2 resistor (high sheet rho) shall be covered by RES_MK marking.
RES_MK length shall be coincide with resistor length (Defined by Pplus space)
and width covering the width of Poly2. ')
hres12a_l1.forget
mk_hres12a.forget

# Rule HRES.12b: If the size of single RES_MK mark layer is greater than 15000 um2
## and both side (X and Y) are greater than 80 um.
## Then the minimum spacing to adjacent RES_MK layer. is 20µm
logger.info('Executing rule HRES.12b')
hres12b = res_mk.with_area(15_000.001.um, nil).edges.with_length(80.001.um, nil)
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hres12b_l1 = hres12b.separation(res_mk.edges, 20.um)
hres12b_l1.output('HRES.12b',
'HRES.12b : If the size of single RES_MK mark layer is greater than 15000 um2
and both side (X and Y) are greater than 80 um.
Then the minimum spacing to adjacent RES_MK layer. : 20µm')
hres12b_l1.forget
hres12b.forget
hres_poly.forget

end
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